Phonon-mediated dissipation in micro- and nano-mechanical systems
نویسنده
چکیده
We study phonon-mediated dissipation mechanisms in small-scale mechanical systems in light of recent efforts to design high-Q micrometerand nanometer-scale electro-mechanical systems (MEMS and NEMS). We consider dissipation mechanisms which redistribute the energy within a resonator, such as thermoelastic damping, the Akhiezer effect, and the Landau–Rumer effect, as well as the radiation of energy away from the resonator into its surroundings. r 2002 Elsevier Science B.V. All rights reserved. PACS: 63.22.+m; 62.25.+g; 62.30.+d
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